000 00347nam a2200133Ia 4500
008 240407s9999 xx 000 0 und d
020 _a9780471270522
100 _aO'Hanlon, John F.
245 2 _aA user's guide to Vacuum Technology
250 _a3rd ed.
260 _aNew Jersey
_bJohn Wiley and Sons
_c2003
300 _axviii, 516p.
942 _cBK
999 _c283
_d283